Surface defect inspection apparatus, surface defect inspection method, and surface defect inspection program

表面缺陷检查装置、表面缺陷检查方法及表面缺陷检查程序

Abstract

A surface-defect inspection apparatus includes a line light source that irradiates a pattern light having brightness differentiated in a direction oblique to a sub-scanning direction of a rotating inspection target object; a line sensor that carries out a one-dimensional imaging of the inspection target object in a main scanning direction using an irradiated pattern light and reflected from the inspection target object; a phase detecting unit that detects a change of the phase of the brightness of a taken line image; and an control unit that controls the position of the line sensor to keep constant a relative distance between a position of the inspection target object and a position of the line sensor from a change of the phase.
由一维摄像装置检出一维摄像装置与检查对象物的相对距离的变动,从而高精度地检出检查对象物的缺陷。表面缺陷检查装置具有:线光源,其对旋转的检查对象物,在副扫描方向的斜向照射亮度不同的带有条纹的图形光;线传感器,其由被照射图形光的检查对象物反射的光,对检查对象物在主扫描方向进行一维摄像;相位检出部,其检出被摄像的线图像的亮度的相位变化;摄像位置控制部,其为了根据相位变化、使检查对象物与线传感器的相对距离保持一定,而控制线传感器的位置。

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    EP-2891878-A1July 08, 2015Bell Helicopter Textron Inc.Système automatisé de détection de défaut avec particules magnétiques et pénétration fluorescente